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SEMI E87-0921 (technical revision)
SEMI E88-0701 (technical revision)
SEMI MF951-0305 (Reapproved 0211)
open field bus standard for a wide range of applications in manufacturing
MF104800 - SEMI MF1048 - Test Method for Measuring the Reflective Total Integrated Scatter StdPbc-0114 SEMI E87-0921 (technical revision)This Test Method covers the measurement of scatter signals from surfaces into most of the reflective hemispherical collector above the surface. Calculation of the TIS, called Haze in some industries, is defined. This Test Method is particularly applicable to clean, optically smooth, front surface reflectors, such as semiconductor wafers, computer disk substrates, and mirrors, because under certain conditions the measured signals can be related to
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